Surface Profile Analyzer

SPA 25


The DataPhysics Surface Profile Analyzer SPA 25 is a high-speed, high-resolution surface analysis instrument that uses white-light interferometry to measure surface topography and roughness parameters with a height resolution of down to 0.1 nm. The SPA 25 can be used in conjunction with the DataPhysics OCA series of optical contact angle measuring systems to provide further insight into surface properties, such as the surface corrected contact angle according to the Wenzel theory.

The SPA 25 equipment comes with the industry leading MountainsMap® Imaging Topography software, which provides a comprehensive set of tools for the analysis of the studied surface. The software allows users to create 3D maps of large surface areas (up to 300 mm x 300 mm with automated sample table) and to detect defects caused by material processing and treatment. The surface roughness can be analyzed according to various industry standards, such as ISO 25178, ISO 4287, ISO 13565, ISO 16610, etc.

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  • white-light interferometry measurement technique with z-direction resolution being independent of the magnification factor of the used objective.
  • precision piezoelectric scan drive in combination with gauge control
  • up to 400 μm scan range in z-direction and with a scan speed of 11.3 μm/s at full resolution
  • USB 3 high speed camera up to 3000 frames/s
  • two scan modes:
    - EPSI (extended phase shift interferometry) with 0.1 nm height resolution
    - VSI (vertical scanning interferometry) with 1 nm height resolution
  • Mirau interferometer microscope objectives with different magnification factors
  • Either use of automatic or manual sample table

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