Spin Coater


The Easyline Lab Spinner Modules from Obducat are available in table top, bench mounted model as well as standalone process tools which provides high uniformity and repeatability and user friendliness during usage. They are widely used in applications in cleaning, rinsing, drying, coating, etching and developing.

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  • Wafer size up to Ø 12“ (Ø 300 mm) or substrate size up to 9“ X 9“ (230 mm X 230 mm)
  • Simple change over from Ø 2“- 12” wafers and up to 9” X 9” substrates
  • Programmable spin speed up to 6000 rpm
  • Manual switch for chuck vacuum with vacuum gauge
  • Color touch screen allows easy operation
  • Transparent cover lid with safety interrupt sensor
  • CE Marked

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